Instrument Principle

The interferometer utilizes analyzing the interference pattern, the optical path difference at any point of the pattern can be calculated, which represents the degree of inconsistency in shape or inclination between the surface under test and the reference surface. 

Detection Range

1. Equipped with hologram for detecting cylindrical surface shape, it can accurately measure the surface finishing value of cylindrical surfaces.
2. Equipped with CGH for detecting aspherical surfaces, it can accurately measure the surface finishing value of aspherical surfaces.
3. Equipped with an extended detection platform, it can measure the radius and surface finishing of workpieces with a radius of over 1000mm.

Detection Function

Single-lens reflective center deviation measurement
Single-lens transmissive center deviation measurement
Effective focal length (EFL) measurement
On-axis MTF measurement
Measurement of curvature radius
Measurement of BFL

Technical Indicators

The maximum outer diameter of the tested single lens: 200mm
Measurement accuracy: 0.2μm
Focal length or curvature radius range: ±5~±2000mm

Main Applications

Currently, it is mainly applied to the basic dimensions, angles, distances of mechanical parts, tooling molds, irregularly shaped parts and optical components, as well as the shape and position tolerances and runout between selected elements. It can also accurately measure the actual radius values of large-sized (diameter 300 - 650mm) and large-radius (R 3000+) optical components.

Basic Parameters

Maximum stroke:700×700×600
Measurement accuracy:(2.6 + L/300) μm
Operating mode:Manual mode, Automatic mode
Length measurement system:Glass ceramic grating ruler, resolution 0.2 μm

Instrument Parameters

Light source:Deuterium lamp, tungsten lamp, mercury lamp. Among them, the mercury lamp is used for wavelength calibration to ensure the accuracy of the instrument's wavelength over a long period of use. The three light sources switch automatically.
Automation:Fully automatic polarizer, variable angle transmission, variable angle reflection, scattering, diffuse reflection, absorption testing functions are integrated in one system, and there is no need to switch between different accessories.
Instrument noise:≤0.0005A (2A at 1500nm)
Bandwidth:Ultraviolet-visible: 0.01 - 5nm, automatically adjusted with 0.01nm intervals; Near-infrared: 0.04 - 20nm, automatically adjusted with 0.01nm intervals
Wavelength accuracy:Ultraviolet-visible ≤ ±0.08nm; Near-infrared ≤ ±0.4nm
Wavelength repeatability:Ultraviolet-visible ≤ ±0.005nm; Near-infrared ≤ ±0.02nm
Photometric accuracy:±0.00025A (0.3Abs double slit method)
Photometric repeatability:±0.00014A (0.5 - 1A)
Resolution:Better than 0.048nm (ultraviolet-visible region)

Equipment Introduction

Boxin is equipped with a Mahr profile measuring instrument, which can perform high-precision measurements on aspherical surfaces.
Measurement Parameters

Features

Vertical direction resolution: 2 nm
Shape error: less than 100 nm

Equipment Introduction

Boxin is equipped with a Zygo white light interferometer, which is a non-contact measurement method based on the principle of white light interference. It is used to measure the surface Ra of various ultra-smooth to rough workpieces.

Measurement Parameters

It can measure the roughness, flatness and microscopic geometric profiles of workpieces ranging from the nanometer level to the micrometer level.

Equipment Introduction

Boxin is equipped with a digital cylindrical lens centration meter in a horizontal structure. It can perform efficient and precise measurements of the tilt, offset and wedge angle of the cylindrical lens axis in a non-contact and non-destructive manner.

Measurement parameters

The eccentricity measurement accuracy of the cylindrical lens can reach ±1 micron.

Equipment Introduction

Boxin is equipped with a laser damage threshold detector. It uses a 1064nm water-cooled pulsed laser with adjustable laser power density. It irradiates optical lenses and films with laser radiation, and uses a high-power microscope to detect surface defects and calculate the damage threshold.

Measurement Parameters

Test range: 10J/cm² - 400J/cm².